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337 Engineering Research Building
1500 Engineering Drive
Madison, WI 53706

Ph: (608) 263-4970
Fax: (608) 265-2364

Profile Summary

Professor Hershkowitz is an experimental plasma physicist with current research interests in plasma-aided manufacturng, basic plasma physics, plasma diagnostics and in in RF effects inprocessing and in fusion plasmas,. He is Director of tge Center for Plasma-Aided manufacturing (C-PAM) and of the Phaedrus laboratory for Plasma Science which investigate plasma applications and basic science issues associated with colder plasmas (about 3 eV) respectively.

C-PAM is investigating plasma etching, thin layer deposition and thick layer deposition using a large variety of plasma tools operating at pressures ranging from below 1mTorr to 1 atm. C-PAM also has a very extensive set of in-situ gas phase diagnostics. This Center is providing important input to U.S. industry.

Phaedrus studies curently include Bohm presheath physics and helicon wave studies.

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