Max Lagally

Erwin W. Mueller Professor and Bascom Professor of Surface Science

1109 Engineering Research Building
1500 Engineering Drive
Madison, WI 53706

Ph: (608) 263-2078
Fax: (608) 265-4118
lagally@engr.wisc.edu


Education

  • BS (physics) 1963, Pennsylvania State University
  • MS (physics) 1965, University of Wisconsin-Madison
  • PhD (physics) 1968, University of Wisconsin-Madiso

Education

  • BS (physics) 1963, Pennsylvania State University
  • MS (physics) 1965, University of Wisconsin-Madison
  • PhD (physics) 1968, University of Wisconsin-Madiso

Research Interests

  • Nanoscale properties of surfaces, interfaces, thin films, and dimensionally confined structures
  • Atom-scale mechanisms of film growth: Group IV semiconductors, nano-strain engineering, silicon nanomembranes
  • relationship of nanostructure to localized electronic and optoelectronic properties, quantum dots
  • Development of advanced instrumentation for growth and surface and interface studies, in particular diffraction, imaging, and scanned-probe microscopies
  • Bioarrays and biomolecular surface modificatio

Awards, Honors and Societies

  • Elected to the National Academy of Engineering in 2000.
  • Elected to Fellowship in the American Association for the Advancement of Science (AAAS) in 1999.
  • Elected a member of the Deutsche Akademie der Naturforscher - Leopoldina (the German National Academy of Science) in 1999.
  • Outstanding Science Alumnus Award, Pennsylvania State University, 1996.
  • Davisson-Germer Prize, American Physical Society, 1995.
  • Welch Award, AVS, 1991

Publications

  • \"Influence of Surface Chemical Modification on Charge Transport Properties in Ultra-thin Silicon Membranes\", S. A. Scott, W. Peng, A. M. Kiefer, H.-Q. Jiang, I. Knezevic, D. E. Savage, M. A. Eriksson, and M. G. Lagally, ACS Nano 3, 1683 (2009).
  • \"Control of island growth with mechanically responsive single-crystal nanomembrane substrates\", H.-J. Kim-Lee, D.E. Savage, C.S. Ritz, M.G. Lagally, and K.T. Turner, Phys. Rev. Letters 102, 226103 (2009).
  • \"Mechano-electronic Superlattices in Silicon Nanomembranes\", Minghuang Huang, C. S. Ritz, B. Novakovic, D.C.Yu, Yu Zhang, F. Flack, D. E. Savage, I. Knezevic, P. G. Evans, F. Liu, and M. G. Lagally, ACS Nano 3, 721 (2009).
  • \"Nanomechanical Architectures --- Mechanics-Driven Fabrication Based on Crystalline Membranes\", Feng Liu, M. G. Lagally, and Ji Zang, MRS Bulletin 34, 190 (2009)
  • \"Excitation of Longitudinal and Transverse Coherent Acoustic Phonons in Nanometer Free-Standing Films of (001)-Si\", M. Harb, W. Peng, G. Sciaini, Ch.T. Hebeisen, R. Ernstorfer, M.A. Eriksson, M.G. Lagally, S. G. Kruglik, and R. J. D. Miller, Phys. Rev. B79 0194301 (2009)
  • \"Flexible Photodetectors on Plastic Substrates by Use of Printing Transferred Single-Crystal Germanium Membranes\", H.-C.Yuan, J.Y. Shin, G.X. Qin, L. Sun, P. Bhattacharya, M.G. Lagally, G.K. Celler, and Z.Q.Ma, Appl. Phy. Letters 94, 013102 (2009)
  • \"Phonon Transport and Thermoelectricity in Silicon Nanostructures\", H-J. Ryu, C. S. Ritz, L. J. Klein, H. F. Hamann, M. G. Lagally, and M. A. Eriksson, ECS Proceedings 16, 983 (2008).
  • \"Silicon Nanomembranes Incorporating Strain and Mixed Crystal Orientations\", S.A. Scott, D.M. Cottrill, D.E. Savage, and M.G. Lagally, ECS Proceedings 16, 215 (2008).
  • \"Influence of Strain on Band Structure in Strained Silicon Nanomembranes\", C. Euaruksakul, Z. W. Li, F. Zheng, F. J. Himpsel, C. S. Ritz, B. Tanto, D. E. Savage, X. S. Liu, and M. G. Lagally, Phys. Rev. Letters 101, 147403 (2008).
  • \"Plasma-enhanced synthesis of thin fluoropolymer layers with low Raman and fluores-cence backgrounds\", Hongquan Jiang, M. K. Jantan, S. Manolache, F. S. Denes, and M. G. Lagally, Langmuir 24, 8672-8677 (2008).
  • \"Spin Blockade and Coherence Enhanced Transport in a Few-Electron Si/SiGe Double Quantum Dot\", N. Shaji, C. B. Simmons, M. Thalakulam, L. J. Klein, H. Qin, H. Luo, D. E. Savage, M. G. Lagally, A. J. Rimberg, R. Joynt, M. Friesen, R. H. Blick, S. N. Coppersmith, and M. A. Eriksson, Nature Physics 4, 540 (2008).
  • \"Electronically Driven Structure Changes of Silicon Captured by Femtosecond Electron Diffraction\", M. Harb, R. Ernstorfer, Ch. T. Hebeisen, G. Sciaini, Weina Peng, Th. Dartigalongue, M.A. Eriksson , M.G. Lagally, S.G. Kruglik, and R.J.D. Miller, Phys. Rev. Letters 100, 155504 (2008).
  • \"Top-Gated Few-Electron Double Quantum Dot in Si/SiGe\", N. Shaji, C.B. Simmons, L.J. Klein, H. Qin, D.E. Savage, M.G. Lagally, S.N. Coppersmith, R. Joynt, M. Friesen, R.H. Blick, and M.A. Eriksson, Physica E: Low-Dimensional Systems & Nanostructures 40, 520 (2008).
  • \"Thermally Processed High-Mobility MOS Thin-Film Transistors on Transferable Single-Crystal Elastically Strain-Sharing Si/SiGe/Si Nanomembranes\", H-C. Yuan, M.M. Roberts, D.E. Savage, M.G. Lagally, G.K. Celler, and Z.Q. Ma, IEEE Transactions on Electron Devices 55, 810 (2008).
  • \"Single-Electron Quantum Dot in Si/SiGe with Integrated Charge Measurement\", C.B. Simmons, M. Thalakulam, N. Shaji, L.J. Klein, Hua Qin, R.H. Blick, D.E. Savage, M.G. Lagally, S.N. Coppersmith, and M.A. Eriksson, Appl. Phys. Letters 91, 213103 (2007).
  • \"Directed Self-Assembly of Quantum Dots by Local Chemical Potential Control via Strain Engineering on Patterned Substrates\", M-H Huang, Feng Liu, and M.G. Lagally, in Lateral Alignment of Epitaxial Quantum Dots, ed. Oliver G. Schmidt, Springer Series on Nanoscience and Technology 2007.
  • \"Routes Toward Lateral Self-Organization of Quantum Dots: The Model System SiGe on Si(001)\", Ch. Teichert and M.G. Lagally, Ch.2 in Lateral Alignment of Epitaxial Quantum Dots, ed. Oliver G. Schmidt, Springer Series on Nanoscience and Technology 2007
  • \"Structure of Elastically Strain-Shared Silicon (110) Nanomembranes\", A. Opotowsky, S.A. Scott, D.E. Savage, and M.G. Lagally, New J. of Physics 9, 270 (2007).
  • \"Silicon-on-Insulator for Symmetry-Converted Growth\", Y. Fujikawa, Y. Yamada-Takamura, G. Yoshikawa, T. Ono, M. Esashi, P.P. Zhang, M.G. Lagally, and T. Sakurai, Appl. Phys. Letters 90, 243107 (2007).
  • \"Complementary Single-Crystal Silicon TFTs on Plastic\", H.-C. Yuan, Z.Q. Ma, C.S. Ritz, D.E. Savage, M.G. Lagally, and G.K. Celler, ECS Trans. 6, 139 (2007).
  • \"Single-Crystal/Amorphous Multilayer Heterostructures Based on Membrane Transfer\", Weina Peng, M.M. Roberts, E.P. Nordberg, F.S. Flack, P.E. Colavita, R.J. Hamers, D.E. Savage, M.G. Lagally, and M.A. Eriksson, Appl. Phys. Letters 90, 183107 (2007)
  • \"Elastically Strain Sharing Nanomembranes: Flexible and Transferable Strained Silicon and Silicon-Germanium Alloys\", S.A. Scott and M.G. Lagally, J. Phys. D. (Applied Physics) 40, R1 (2007).
  • \"Silicon Nanomembranes\", M.G. Lagally, MRS Bulletin 32, 57 (2007). (invited)
  • \"Double-Layer Based Electronic Nanodevices Fabricated on Silicon Nanoneedles\", V.Joshkin, D. van der Weide, and M.G. Lagally, J. Appl. Phys. 100, 084329 (2006).
  • \"Elastically Relaxed Free-Standing Strained-Si Nanomembranes\", M.M. Roberts, L.J. Klein, D.E. Savage, M. Friesen, G.K. Celler, M.A. Eriksson, and M.G. Lagally, Nature Materials 5, 388 (2006).
  • \"Electronic Transport in Nanometre-Scale Silicon-on-Insulator Membranes\", P. P. Zhang, E. Tevaarwerk, B.-N. Park, D.E. Savage, G.K. Celler, I. Knezevic, P.G. Evans, M.A. Eriksson, and M.G. Lagally, Nature 439, 703 (2006).
  • \"Method for Double-sided Processing of Thin-Film Transistors\", H.-C. Yuan
  • Z.Q. Ma, G. Wang, P.G. Evans, M.A. Eriksson, and M.G. Lagally, patent # 7,345,809, April 8, 2008.
  • \"Plasma-Enhanced Functionalization of Carbon-Containing Substrates\", F. S. Denes, S. O. Manolache, L.E. Cruz-Barba, B. J. Larson, and M.G. Lagally, patent # 7,276,283, October 2, 2007.
  • \"Fabrication of Silicon/Silicon-Germanium Heterojunction Structures\". M.R. Roberts, D.E. Savage, and M.G. Lagally, patent # 7,229,901, June 12, 2007.
  • \"Stress Control of Semiconductor Microstructures for Thin Film Growth\", A. Lal, C. H. Lee, P. Rugheimer, and M. Lagally, patent # 7,109,121, September 19, 2006
  • \"Deposition of Samples and Sample Matrix for Enhancing the Sensitivity of Matrix Assisted Laser Desorption/Ionization Mass Spectroscopy\", D. M. Barnes, M. G. Lagally, B.J. Larson, and M.M. Vestling, patent # 7,095,018, August 22, 2006.
  • \"Methods and Apparata for Precisely Dispensing Microvolumes of Fluids\", Bradley J. Larson, Chung Hoon Lee, Amit Lal, and M. G. Lagally, patent # 6,874,699, April 5, 2005. (Licensed)
  • \"Stress Control of Semiconductor Microstructures for Thin Film Growth\", A. Lal, C. H. Lee, P. Rugheimer, and M. Lagally, patent # 6,858,888, February 22, 2005.
  • \"Solid-State Quantum Dot Devices and Quantum Computing Using Nanostructured Logic Gates\", M. A. Eriksson, M. G. Friesen, R. J. Joynt, M. G. Lagally, D. W. van der Weide, P. Rugheimer, and D. E. Savage, patent # 6,597,010, July 22, 2003.
  • \"Sensorless Control for Piezoelectric Positioners\", S.H. Walker, R.D. Lorenz, and M.G. Lagally, patent # 5,714,831, February 3, 1998. (Licensed)
  • \"Low-Voltage Field Emission Gun\", J. A. Martin and M. G. Lagally, patent # 4,427,886, January 24, 1984

Links

Courses

Fall 2016-2017

  • MS&E 803 - Special Topics in Materials Science
  • MS&E 890 - Pre-Dissertator\'s Research
  • MS&E 990 - Research and Thesis
  • MS&E 699 - Independent Study
  • PHYSICS 990 - Research
  • MS&E 790 - Master\'s Research or Thesis
  • MS&E 803 - Special Topics in Materials Science
  • MS&E 890 - Pre-Dissertator\'s Research
  • MS&E 990 - Research and Thesis
  • MS&E 434 - Introduction to Thin-Film Deposition Processes
  • MS&E 699 - Independent Study
  • CHEM 699 - Directed Study
  • PHYSICS 990 - Research

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